Cantu, PietroPietroCantuBaldi, LivioLivioBaldiDe Simone, DaniloDaniloDe SimonePiacentini, PaoloPaoloPiacentiniFliervoet, TimonTimonFliervoetAlberga, GeroldGeroldAlbergaLe Gratiet, BertrandBertrandLe GratietGaugiran, StephanieStephanieGaugiranWong, PatrickPatrickWongMiyashita, HiroyukiHiroyukiMiyashitaAtzei, Luisa RitaLuisa RitaAtzeiBuch, XavierXavierBuchVerkleiji, DickDickVerkleijiToublan, OlivierOlivierToublanPerez Murano, FrancescFrancescPerez MuranoMecerreyes, DavidDavidMecerreyes2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16821LENS - Lithography enhancement towards nano scaleOral presentation