Loo, RogerRogerLooHikavyy, AndriyAndriyHikavyyVincent, BenjaminBenjaminVincentWang, GangGangWangVanherle, WendyWendyVanherleGencarelli, FedericaFedericaGencarelliNguyen, DuyDuyNguyenRosseel, ErikErikRosseelSouriau, LaurentLaurentSouriauRondas, DirkDirkRondasDekoster, JohanJohanDekosterCaymax, MattyMattyCaymax2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17526Epitaxial Si, SiGe and Ge for high-performance devicesOral presentation