RTS noise due to lateral isolation related defects in submicron

Lukyanchikova, N.N.LukyanchikovaPetrichuk, M.M.PetrichukGarbar, N.N.GarbarSimoen, EddyEddySimoenClaeys, C.C.Claeys2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2743RTS noise due to lateral isolation related defects in submicronJournal article