Decoutere, StefaanStefaanDecoutereVan Huylenbroeck, StefaanStefaanVan HuylenbroeckHeinemann, BerndBerndHeinemannFox, AlexanderAlexanderFoxChevalier, PascalPascalChevalierChantre, AlainAlainChantreMeister, ThomasThomasMeisterAufinger, KlausKlausAufingerSchroter, MichaelMichaelSchroter2021-10-172021-10-172009-10https://imec-publications.be/handle/20.500.12860/15205Advanced process modules and architectures for half-terahertz SiGe:C HBTsProceedings paper