Feasibility of compensating for EUV field edge effects through OPC

Maloney, ChrisChrisMaloneyWord, JamesJamesWordFenger, GermainGermainFengerNiroomand, ArdavanArdavanNiroomandLorusso, GianGianLorussoJonckheere, RikRikJonckheereHendrickx, EricEricHendrickxSmith, BruceBruceSmith2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24193Feasibility of compensating for EUV field edge effects through OPCProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1863985