van der Veen, MarleenMarleenvan der VeenVereecke, BartBartVereeckeMasahito, SugiuraSugiuraMasahitoKashiwagi, YusakuYusakuKashiwagiKe, XiaoxingXiaoxingKeCott, DaireDaireCottVanpaemel, JohannesJohannesVanpaemelVereecken, PhilippePhilippeVereeckenDe Gendt, StefanStefanDe GendtHuyghebaert, CedricCedricHuyghebaertTokei, ZsoltZsoltTokei2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21696Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallizationProceedings paper