Ni-based silicides for 45 nm CMOS and beyond

Lauwers, AnneAnneLauwersKittl, JorgeJorgeKittlVan Dal, MarkMarkVan DalChamirian, OxanaOxanaChamirianKmieciak, MalgorzataMalgorzataKmieciakde Potter de ten Broeck, MurielMurielde Potter de ten BroeckLindsay, RichardRichardLindsayRaymakers, ToonToonRaymakersPagès, XavierXavierPagèsMebarki, BencherkiBencherkiMebarkiMandrekar, TusharTusharMandrekarMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9182Ni-based silicides for 45 nm CMOS and beyondJournal article