High resolution 2D scanning spreading resistance microscopy (SSRM) of thin film SOI MOSFETs with ultra short effective channel length

Hartwich, J.J.HartwichAlvarez, DavidDavidAlvarezDreeskornfeld, L.L.DreeskornfeldHoffman, F.F.HoffmanKretz, J.J.KretzLandgraf, E.E.LandgrafLuyken, R.J.R.J.LuykenRösner, W.W.RösnerSchulz, T.T.SchulzSpecht, M.M.SpechtStädele, M.M.StädeleVandervorst, WilfriedWilfriedVandervorstRisch, LotharLotharRisch2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7642High resolution 2D scanning spreading resistance microscopy (SSRM) of thin film SOI MOSFETs with ultra short effective channel lengthProceedings paper