Scalpel Soft Retrace Scanning Spreading Resistance microscopy for 3D-carrier profiling in sub 10-nm WFIN FinFETs

Eyben, PierrePierreEybenChiarella, ThomasThomasChiarellaKubicek, StefanStefanKubicekBender, HugoHugoBenderRichard, OlivierOlivierRichardMitard, JeromeJeromeMitardMocuta, AndaAndaMocutaHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25260Scalpel Soft Retrace Scanning Spreading Resistance microscopy for 3D-carrier profiling in sub 10-nm WFIN FinFETsProceedings paper