Chen, WanghuaWanghuaChenDepauw, ValerieValerieDepauwHaddad, FarahFarahHaddadMaurice, Jean-LucJean-LucMauriceRoca i Cabarrocas, PerePereRoca i Cabarrocas2021-10-232021-10-2320160927-0248https://imec-publications.be/handle/20.500.12860/26439Influence of anodic bonding on the surface passivation quality of crystalline siliconJournal articlehttp://www.sciencedirect.com/science/article/pii/S0927024816301325