Jaenen, PatrickPatrickJaenenSlabbekoorn, JohnJohnSlabbekoornMiller, AndyAndyMillerFlack, Warren W.Warren W.FlackRanjan, ManishManishRanjanKenyon, GarethGarethKenyonHsieh, RobertRobertHsiehNguyen, Ha-AiHa-AiNguyen2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22535Microbump lithography for 3D stacking applicationsMeeting abstract