Palov, A.A.PalovRakhimova, TTRakhimovaKrishtab, MikhailMikhailKrishtabBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-2220151071-1023https://imec-publications.be/handle/20.500.12860/25725Calculation of dielectric constant of porous SiCOH low-k filmsJournal articlehttp://scitation.aip.org/content/avs/journal/jvstb/33/2/10.1116/1.4906816