Bearda, TwanTwanBeardaMertens, PaulPaulMertensHolsteyns, FrankFrankHolsteynsDe Bisschop, PeterPeterDe BisschopCompen, ReneReneCompenvan Meer, AschwinAschwinvan MeerHeyns, MarcMarcHeyns2021-10-162021-10-162005-10https://imec-publications.be/handle/20.500.12860/10071The effect of backside particles on substrate topographyJournal article