Pollentier, IvanIvanPollentierLee, Jae UkJae UkLeeTimmermans, MarinaMarinaTimmermansAdelmann, ChristophChristophAdelmannZahedmanesh, HoumanHoumanZahedmaneshHuyghebaert, CedricCedricHuyghebaertGallagher, EmilyEmilyGallagher2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29202Novel membrane solutions for the EUV pellicle : better or not ?Proceedings paper10.1117/12.2257891