Thin-film multi-chip module technology in high-resistivity Si for the integration of millimeter wave systems

Posada Quijano, GuillermoGuillermoPosada QuijanoCarchon, GeertGeertCarchonPoesen, GertGertPoesenNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe Raedt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11042Thin-film multi-chip module technology in high-resistivity Si for the integration of millimeter wave systemsProceedings paper