Analysis of the total resistance in standard and strained FinFET devices with and without the u se of SEG

Nicoletti, T.T.NicolettiMartino, J.A.J.A.MartinoSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15924Analysis of the total resistance in standard and strained FinFET devices with and without the u se of SEGProceedings paper