Horzel, JörgJörgHorzelStorm, WolfgangWolfgangStormTrenkler, ThomasThomasTrenklerSivoththaman, SivanarayanamoorthySivanarayanamoorthySivoththamanNijs, JohanJohanNijsMertens, RobertRobertMertensAdriaenssens, G.G.Adriaenssens2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1264Improved understanding and characterisation of rapid thermal oxidesProceedings paper