Very low sheet resistance AlInN/GaN HEMT grown on 100mm Si(111) by MOVPE

Cheng, KaiKaiChengDegroote, StefanStefanDegrooteLeys, MaartenMaartenLeysMedjdoub, FaridFaridMedjdoubDerluyn, JoffJoffDerluynSijmus, BramBramSijmusGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-182021-10-1820101610-1634https://imec-publications.be/handle/20.500.12860/16852Very low sheet resistance AlInN/GaN HEMT grown on 100mm Si(111) by MOVPEJournal article