de Marneffe, Jean-FrancoisJean-Francoisde MarneffeMarinov, DaniilDaniilMarinovZhang, JianranJianranZhangWith, PatrickPatrickWithSmets, QuentinQuentinSmetsArutchelvan, GouthamGouthamArutchelvanVoronina, E.E.VoroninaMankelevitch, YuriYuriMankelevitchRakhimova, TatyanaTatyanaRakhimovaBal, KristofKristofBalAsselberghs, IngeIngeAsselberghsDe Gendt, StefanStefanDe Gendt2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32805Dry cleaning of WS2 using reducing downstream plasmaMeeting abstract