Foubert, PhilippePhilippeFoubertKocsis, MichaelMichaelKocsisGronheid, RoelRoelGronheidKishimura, ShinjiShinjiKishimuraSoyano, AkimasaAkimasaSoyanoNafus, KathleenKathleenNafusStepanenko, NickolayNickolayStepanenkoDe Backer, JohanJohanDe BackerVandenbroeck, NadiaNadiaVandenbroeckErcken, MoniqueMoniqueErcken2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12165Measurement and evaluation of water uptake by resists, top coats and stacks and correlation with watermark defectsProceedings paper