Characterization and optimization of positive tone DUV resists on TiN substrates

Zandbergen, PeterPeterZandbergenGehoel-van Ansem, W.W.Gehoel-van AnsemVandenberghe, GeertGeertVandenbergheVan Driessche, VeerleVeerleVan DriesscheVloeberghs, H.H.Vloeberghs2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2319Characterization and optimization of positive tone DUV resists on TiN substratesProceedings paper