Welna, KarlKarlWelnaDebnath, K.K.DebnathDumon, PieterPieterDumonKhanna, AmitAmitKhannaKrauss, T.F.T.F.KraussO'Faolain, LiamLiamO'Faolain2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24813High Q photonic crystal cavities realised using deep ultraviolet lithographyProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6961997