Min, Woo SigWoo SigMinLantasov, YuriYuriLantasovPalmans, RogerRogerPalmansMaex, KarenKarenMaexDong, Nyung LeeNyung LeeDong2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3681The formation of Pd seeded copper layer on TiN substrates by electroless depositionProceedings paper