Importance of the substrate' s surface evolution during the MOVPE growth of 2D-transition metal dichalcogenides

Mo, JiongjiongJiongjiongMoEl Kazzi, SalimSalimEl KazziMortelmans, WouterWouterMortelmansNalin Mehta, AnkitAnkitNalin MehtaSergeant, StefanieStefanieSergeantSmets, QuentinQuentinSmetsAsselberghs, IngeIngeAsselberghsHuyghebaert, CedricCedricHuyghebaert2021-10-292021-10-2920200957-4484https://imec-publications.be/handle/20.500.12860/35591Importance of the substrate' s surface evolution during the MOVPE growth of 2D-transition metal dichalcogenidesJournal articlehttps://doi.org/10.1088/1361-6528/ab5ffd