Gencarelli, FedericaFedericaGencarelliVincent, BenjaminBenjaminVincentSouriau, LaurentLaurentSouriauLoo, RogerRogerLooCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18945Ge low-temperature chemical vapor deposition (CVD) using Ge2H6Oral presentation