Roles of hydrogen plasma on the growth of h-BN nanowalls in differing substrate stages and temperatures using rf sputtering

Hoang, Duc-QuangDuc-QuangHoangJanssens, StoffelStoffelJanssensPobedinskas, PauliusPauliusPobedinskasRuttens, BartBartRuttensD'Haen, JanJanD'HaenHaenen, KenKenHaenen2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23942Roles of hydrogen plasma on the growth of h-BN nanowalls in differing substrate stages and temperatures using rf sputteringOral presentation