Plasma-assisted and thermal atomic layer deposition of ALD of electrochemically active Li2CO3 for Li-ion batteries

Hornsveld, NorahNorahHornsveldPut, BrechtBrechtPutKessels, W.M.M.W.M.M.KesselsVereecken, PhilippePhilippeVereeckenCreatore, MMCreatore2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28524Plasma-assisted and thermal atomic layer deposition of ALD of electrochemically active Li2CO3 for Li-ion batteriesMeeting abstracthttp://www.mrs.org/technical-programs/programs_abstracts/nm05_07_24_23