Analytical electron microscopy of Si1-xGex/Si heterostructures and local isolation structures

Armigliato, A.A.ArmigliatoBalboni, R.R.BalboniCorticelli, F.F.CorticelliMalvezzi, F.F.MalvezziVanhellemont, JanJanVanhellemont2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/505Analytical electron microscopy of Si1-xGex/Si heterostructures and local isolation structuresJournal article