Teugels, LieveLieveTeugelsOng, PatrickPatrickOngWaldron, NiamhNiamhWaldronBoccardi, GuillaumeGuillaumeBoccardiUsman Ibrahim, AnsarAnsarUsman IbrahimSiebert, MaxMaxSiebertLeunissen, LeonardusLeonardusLeunissen2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24610Improving defectivity for III-V CMP processes for < 10 NM technology nodesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=7017234