Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films

Redzheb, MuradMuradRedzhebPrager, LutzLutzPragerNaumov, SergejSergejNaumovArmini, SilviaSilviaArminiVoort, Pascal Van DerPascal Van DerVoortKrishtab, MikhailMikhailKrishtabBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-2320160003-6951https://imec-publications.be/handle/20.500.12860/27203Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k filmsJournal articlehttp://scitation.aip.org/content/aip/journal/apl/108/1/10.1063/1.4939449