HFCVD boron-doped diamond layers: influence of the initial growth stages and wire carburization

Simon, DanielDanielSimonTsigkourakos, MenelaosMenelaosTsigkourakosHantschel, ThomasThomasHantschelConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23093HFCVD boron-doped diamond layers: influence of the initial growth stages and wire carburizationMeeting abstract