Process development and characterization of 3D multi-die stacking

Gerets, CarineCarineGeretsDerakhshandeh, AberAberDerakhshandehBex, PieterPieterBexLofrano, MelinaMelinaLofranoCherman, VladimirVladimirChermanFodor, FerencFerencFodorDe Wolf, IngridIngridDe WolfRebibis, Kenneth JuneKenneth JuneRebibisBeyer, GeraldGeraldBeyerMiller, AndyAndyMillerBeyne, EricEricBeyne2022-01-202021-11-022022-01-202020naWOS:000631824100083https://imec-publications.be/handle/20.500.12860/38046Process development and characterization of 3D multi-die stackingProceedings paper978-1-7281-6293-5WOS:000631824100083