Chang, K.S.K.S.ChangGreen, M.L.M.L.GreenLevin, I.I.LevinHattrick-Simpers, J.R.J.R.Hattrick-SimpersJaye, C.C.JayeFischer, D.A.D.A.FischerTakeuchi, I.I.TakeuchiDe Gendt, StefanStefanDe Gendt2021-10-182021-10-1820100003-6951https://imec-publications.be/handle/20.500.12860/16839Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library filmJournal article