Effects of interfacial strength and dimension of structures on physical cleaning window

Kim, Tae-GonTae-GonKimPacco, AntoineAntoinePaccoWostyn, KurtKurtWostynXu, XiuMeiXiuMeiXuStruyf, HerbertHerbertStruyfArstila, KaiKaiArstilaPark, Jin-GooJin-GooParkDe Gendt, StefanStefanDe GendtMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17376Effects of interfacial strength and dimension of structures on physical cleaning windowMeeting abstract