Integration of Pt/PZT/Pt ferroelectric capacitors into 0.5μm CMOS process for embedded FERAM

Wouters, DirkDirkWoutersNorga, GerdGerdNorgaHaspeslagh, LucLucHaspeslaghDeferm, LudoLudoDefermMaes, HermanHermanMaes2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/4034Integration of Pt/PZT/Pt ferroelectric capacitors into 0.5μm CMOS process for embedded FERAMOral presentation