Lin, Y.S.Y.S.LinPuthenkovilakam, R.R.PuthenkovilakamChang, J.P.J.P.ChangBouldin, C.C.BouldinLevin, I.I.LevinNguyen, N.V.N.V.NguyenEhrstein, J.J.EhrsteinSun, Y.Y.SunPianetta, P.P.PianettaConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstVenturo, V.V.VenturoSelbrede, S.S.Selbrede2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7805Interfacial properties of ZrO2 on siliconJournal article