In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation loss

Kim, Tae-GonTae-GonKimVerheyen, PeterPeterVerheyenDe Heyn, PeterPeterDe HeynVandeweyer, TomTomVandeweyerMiller, AndyAndyMillerPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutJo, AhjinAhjinJoCho, SangjoonSangjoonChoPark, Sang-ilSang-ilPark2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28687In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation lossOral presentationhttps://www.nist.gov/pml/engineering-physics-division/2017-fcmn-presentations