Advanced carrier depth profiling on Si and Ge with M4PP

Clarysse, TrudoTrudoClarysseEyben, PierrePierreEybenParmentier, BrigitteBrigitteParmentierVan Daele, BennyBennyVan DaeleSatta, AlessandraAlessandraSattaVandervorst, WilfriedWilfriedVandervorstLin, RongRongLinPetersen, DirchDirchPetersenFolmer Nielsen, PeterPeterFolmer Nielsen2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11884Advanced carrier depth profiling on Si and Ge with M4PPProceedings paper