Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope

Neumann, Jens TimoJens TimoNeumannSrikantha, AbhilashAbhilashSrikanthaHuethwohl, PhilippPhilippHuethwohlLee, KeumsilKeumsilLeeWilliam, B. JamesB. JamesWilliamKorb, ThomasThomasKorbFoca, EugenEugenFocaGarbowski, TomaszTomaszGarbowskiBoecker, DanielDanielBoeckerDas, SayantanSayantanDasHalder, SandipSandipHalder2024-03-042024-01-082024-03-0420231932-5150WOS:001122014400007https://imec-publications.be/handle/20.500.12860/43359Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscopeJournal article10.1117/1.JMM.22.2.021009WOS:001122014400007