BEOL N2: M2 through SAxP process from MP21 to MP26: 193i SAQP vs EUV SADP

Hermans, YannickYannickHermansWu, ChenChenWuBuccheri, NunzioNunzioBuccheriSchleicher, FilipFilipSchleicherVersluijs, JankoJankoVersluijsMontero Alvarez, DanielDanielMontero AlvarezDey, BappadityaBappadityaDeyWong, PatrickPatrickWongRincon Delgadillo, PaulinaPaulinaRincon DelgadilloPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokeiLeray, PhilippePhilippeLerayHalder, SandipSandipHalder2024-05-162023-06-262024-05-162023-04-280277-786Xhttps://imec-publications.be/handle/20.500.12860/42095BEOL N2: M2 through SAxP process from MP21 to MP26: 193i SAQP vs EUV SADPProceedings paper