Lieten, RubenRubenLietenWhite, DanielaDanielaWhiteParson, ThomasThomasParsonJenq, ShiningShiningJenqFrye, DonDonFryeWhite, MichaelMichaelWhiteTeugels, LieveLieveTeugelsStruyf, HerbertHerbertStruyf2021-10-242021-10-242017-10https://imec-publications.be/handle/20.500.12860/28827Post-CMP cleaners for tungsten advanced nodes: 10 nm and 7 nmProceedings paper