Van Besien, ElsElsVan BesienPantouvaki, MariannaMariannaPantouvakiZhao, LarryLarryZhaoDe Roest, DavidDavidDe RoestBaklanov, MikhaïlMikhaïlBaklanovTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyer2021-10-202021-10-2020120167-9317https://imec-publications.be/handle/20.500.12860/21682Influence of porosity on electrical properties of low-k dielectricsJournal article10.1016/j.mee.2011.04.015