Processing impact on the reliability of single metal dual dielectric (SMDD) gate stacks

Kauerauf, ThomasThomasKaueraufAoulaiche, MarcMarcAoulaicheCho, Moon JuMoon JuChoRagnarsson, Lars-AkeLars-AkeRagnarssonSchram, TomTomSchramDegraeve, RobinRobinDegraeveHoffmann, Thomas Y.Thomas Y.HoffmannGroeseneken, GuidoGuidoGroesenekenBiesemans, SergeSergeBiesemans2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15573Processing impact on the reliability of single metal dual dielectric (SMDD) gate stacksProceedings paper