Challenges in setting up the patterning processes for a 16nm node SRAM cell

Ercken, MoniqueMoniqueErckenVandeweyer, TomTomVandeweyerVersluijs, JankoJankoVersluijsTruffert, VincentVincentTruffertDe Backer, JohanJohanDe BackerDelvaux, ChristieChristieDelvauxBaerts, ChristinaChristinaBaerts2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17079Challenges in setting up the patterning processes for a 16nm node SRAM cellOral presentation