TOF-SIMS as a rapid diagnostic tool to monitor the growth mode of thin (high k) films

Conard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstPetry, JasmineJasminePetryZhao, ChaoChaoZhaoBesling, W.W.BeslingNohira, HiroshiHiroshiNohiraRichard, OlivierOlivierRichard2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7343TOF-SIMS as a rapid diagnostic tool to monitor the growth mode of thin (high k) filmsJournal article