Integration of Directed Self-Assembly (DSA) via patterning in sub-7nm interconnects

Karageorgos, IoannisIoannisKarageorgosDehaene, WimWimDehaeneRyckaert, JulienJulienRyckaert2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26803Integration of Directed Self-Assembly (DSA) via patterning in sub-7nm interconnects - A designer's perspectiveOral presentationhttps://www.esat.kuleuven.be/events/seminar-integration-of-directed-self-assembly-dsa-via-patterning-in-sub-7nm-interconnects-a-