van der Veen, MarleenMarleenvan der VeenSoethoudt, JobJobSoethoudtDelabie, AnneliesAnneliesDelabieVarela Pedreira, OlallaOlallaVarela PedreiraVega Gonzalez, VictorVictorVega GonzalezLariviere, StephaneStephaneLariviereTeugels, LieveLieveTeugelsJourdan, NicolasNicolasJourdanDecoster, StefanStefanDecosterStruyf, HerbertHerbertStruyfWilson, ChrisChrisWilsonCroes, KristofKristofCroesTokei, ZsoltZsoltTokei2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36146Hybrid Metallization with Cu in sub 30nm InterconnectsProceedings paper