Feasibility analysis of direct tunneling through medium-k dielectrics for embedded RAM applications

Govoreanu, BogdanBogdanGovoreanuDegraeve, RobinRobinDegraeveKauerauf, ThomasThomasKaueraufMagnus, WimWimMagnusWellekens, DirkDirkWellekensGroeseneken, GuidoGuidoGroesenekenVan Houdt, JanJanVan Houdt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10524Feasibility analysis of direct tunneling through medium-k dielectrics for embedded RAM applicationsProceedings paper