Low field TDDB of BEOL interconnects using >40 months of data

Croes, KristofKristofCroesRoussel, PhilippePhilippeRousselBarbarin, YohanYohanBarbarinWu, ChenChenWuLi, YunlongYunlongLiBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22188Low field TDDB of BEOL interconnects using >40 months of dataProceedings paper