Phase behavior through pitch and duty cycle and its impact on process window

Buttgereit, UteUteButtgereitBirkner, RobertRobertBirknerSeidel, DirkDirkSeidelPerlitz, SachaSachaPerlitzPhilipsen, VickyVickyPhilipsenDe Bisschop, PeterPeterDe Bisschop2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15058Phase behavior through pitch and duty cycle and its impact on process windowProceedings paper